Accounting for the Complex Surface Structure in Ellipsometric Studies of the Effects of Magnetron Sputtering Modes on the Growth and Optical Properties of In2O3 Films
A. A. TikhiiA. A. Galkin Donetsk Institute for Physics and Engineering, 72 R. Luxemburg Str., Donetsk, 83114, UkraineYu. M. NikolaenkoA. A. Galkin Donetsk Institute for Physics and Engineering, 72 R. Luxemburg Str., Donetsk, 83114, UkraineV. A. GritskihTaras Shevchenko Lugansk National University, Lugansk, 91011, UkraineK. A. SvyrydovaA. A. Galkin Donetsk Institute for Physics and Engineering, 72 R. Luxemburg Str., Donetsk, 83114, UkraineV. V. MurgaDonbas State Technical University, Alchevsk, 94200, UkraineYu. I. ZhikharevaTaras Shevchenko National University of Kyiv, Kyiv, 01033, UkraineI. V. ZhikharevA. A. Galkin Donetsk Institute for Physics and Engineering, 72 R. Luxemburg Str., Donetsk, 83114, Ukraine
2018en
ABI
Аннотация
Аннотация мавжуд эмас.
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