Atomic excitations in sputtering processes
Niels Fogh. AndersenPhysics Laboratory II , H.C. Orsted Institute , Universitetsparken 5, Copenhagen O, DenmarkBjarne AndresenPhysics Laboratory II , H.C. Orsted Institute , Universitetsparken 5, Copenhagen O, DenmarkE. VejePhysics Laboratory II , H.C. Orsted Institute , Universitetsparken 5, Copenhagen O, Denmark
1982en
ABI
Аннотация
Abstract The sputtering of Mg, Cu, Zn, Cia, Au, and TI by Xe+ impact has been studied by optical spectrometry in a 10−9 Torr vacuum. The excitation functions are compared with total sputtering yields. The relative level populations of the sputtered particles follow an (n*)p behavior, almost identical to that for gas single collisions and beam-foil excitations, whereas two intensity distributions based on local thermodynamic equilibrium are shown not to be satisfied.
Ҳали таржима қилинмаган
Идентификаторлар
Иқтибослар ва манбалар
2 та иқтибос0 та фойдаланилган манба