Control of the profile of the impurity distribution in epitaxial layers grown from a solution-melt with regulated volume and composition
A. V. KarimovPhysics and Technology Institute of the Scientific Production Association “Fizika–Solntse”, Academy of Sciences of the Republic of Uzbekistan, 2b Bodomzor Iuli, Tashkent, 100084, UzbekistanD. M. YodgorovaPhysics and Technology Institute of the Scientific Production Association “Fizika–Solntse”, Academy of Sciences of the Republic of Uzbekistan, 2b Bodomzor Iuli, Tashkent, 100084, UzbekistanO. A. AbdulkhaevPhysics and Technology Institute of the Scientific Production Association “Fizika–Solntse”, Academy of Sciences of the Republic of Uzbekistan, 2b Bodomzor Iuli, Tashkent, 100084, Uzbekistan
ABI
Аннотация
Аннотация мавжуд эмас.