A quantum-mechanical model for the ionization and excitation of atoms during sputtering
Juergen M. SchroeerDepartment of Physics, Illinois State University, Normal, Illinois 61761, U.S.AT. N. RhodinSchool of Applied and Engineering Physics and Department of Physics, Cornell University, Ithaca, New York 14850, U.S.ARichard C. BradleySchool of Applied and Engineering Physics and Department of Physics, Cornell University, Ithaca, New York 14850, U.S.A
1973en
ABI
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