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Photoacoustic spectroscopy analysis of thin semiconductor samples

Leszek BychtoFaculty of Electronics and Computer Science, Koszalin University of Technology, 2 Śniadeckich St, 75-453 Koszalin, PolandM. MalińskiFaculty of Electronics and Computer Science, Koszalin University of Technology, 2 Śniadeckich St, 75-453 Koszalin, Poland
2018en
ABI

Аннотация

This paper is an analysis of determination possibility of the optical absorption coefficient spectra of thin semiconductor layers from their normalized photoacoustic amplitude spectra. Influence of multiple reflections of light in thin layers on their photoacoustic and optical absorption coefficient spectra is presented and discussed in detail. Practical formulae for the optical absorption coefficient spectrum as a function of the normalized photoacoustic amplitude spectrum are derived and presented. Next, they were applied for computations of the optical absorption coefficient spectra of thin In2S3 thin layers deposited on a glass substrate. This method was experimentally verified with the optical transmission method.

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