M.C. Elwenspoek

1 ta ish

University of Twente

1. Etching methodologies in <111>-oriented silicon wafers

   R.E. Oosterbroek, Erwin Berenschot, Henri Jansen +4

   MaqolaOAOchiq kirish20002 iqtibos

   ABIABI:AkademIndex/2026.other.239757