Takahisa Kato

1 ta ish

Murata (Japan)

1. Piezoelectric properties of ScAlN thin films for piezo-MEMS devices

   Keiichi Umeda, Hiroyuki Kawai, Akira Honda +3

   Maqola20133 iqtibos

   ABIABI:AkademIndex/2026.other.565026