A. I. Voroshilo

1 ta ish

National Academy of Sciences of Ukraine, Applied Physics Institute, Sumy, Ukraine

1. Influence of relativistic and quantum effects on the blur in projection lithography systems

   S. P. Roshchupkin, V.E. Storizhko, О.И. Денисенко +4

   MaqolaLaser-Matter Interactions and Applications20040 iqtibos

   ABIABI:AkademIndex/openalex/2004.article.000303