B. Sulkio‐Cleff

1 ta ish

University of Muenster, Institute of Nuclear Physics, Muenster

1. Influence of relativistic and quantum effects on the blur in projection lithography systems

   S. P. Roshchupkin, V.E. Storizhko, О.И. Денисенко +4

   MaqolaLaser-Matter Interactions and Applications20040 iqtibos

   ABIABI:AkademIndex/openalex/2004.article.000303