Statistical modeling of the film-coating process in a vacuum
L. I. KalashnikPhysicotechnical Institute of Low Temperatures, Academy of Sciences of the Ukrainian SSR, Khar'kovA. M. KislovPhysicotechnical Institute of Low Temperatures, Academy of Sciences of the Ukrainian SSR, Khar'kovM. A. LivshitsPhysicotechnical Institute of Low Temperatures, Academy of Sciences of the Ukrainian SSR, Khar'kov,
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