The ionic component in the sputtering of metals

Abstract The article gives a systematic account of the results of experimental and theoretical studies of ion components produced in the sputtering of pure metals. Experimental dependences of the characteristics of this phenomenon on a number of parameters are analyzed on the basis of criteria proposed for the purity of the experimental condition and, in particular, for the chemical cleanness. Existing theories of the phenomenon are classified, discussed and critically analyzed. Special attention is paid to the experimental discrimination of specific theoretical models.

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