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Ish: Ion bombardment effect on Si homoepitaxial growth from ion molecular beams

1. “Radiation Sieve” Effect during Epitaxy from Low Energy Ion-Molecular Flow

   A. Budrevich, A. Lyutovich, Б. Л. Оксенгендлер

   MaqolaGeological and Geochemical Analysisphysica status solidi (a)19891 iqtibos

   ABIABI:AkademIndex/1989.article.000071