Dependence of the microwave surface resistance on the structure and thickness of superconducting cuprate films

An investigation is made of the microwave surface resistance R s measured at 10 GHz and 77 K, as a function of the thickness of superconducting epitaxial films of yttrium barium cuprate grown on lanthanum aluminate substrates by magnetron sputtering. Films between 200 and 1800 nm thick have low values R s (0.3–0.5) mΩ and do not show any deterioration. The level of R s achieved in films of comparatively large thickness is mainly attributable to the low rate of film growth (0.8 nm/min).

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