The formation of excited states of sputtered yttrium atoms
С. Н. МорозовArifov Institute of Electronics, Academy of Sciences of Uzbekistan, Tashkent, 700143, UzbekistanE. VasilevaArifov Institute of Electronics, Academy of Sciences of Uzbekistan, Tashkent, Uzbekistan
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ABI
Annotatsiya
Optical spectra of ion-photon emission of atoms sputtered by bombarding the yttrium target surface with 40-keV Xe+ ions are studied experimentally. It is found that the levels corresponding to transitions from the 4d shell are excited more efficiently in the sputtering process. Possible new mechanisms for the excitation of atomic levels in the sputtering of a solid are considered.
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