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Emission of volatile degradation products from polymers irradiated with heavy ions to different fluences

V. HnatowiczNuclear Physics Institute, 250.68 [Rcheck]e[zcheck] near, Prague, Czech RepublicJ. Vacı́kNuclear Physics Institute, 250.68 [Rcheck]e[zcheck] near, Prague, Czech RepublicV. [Sbreve]vor[cbreve]íkInstitute of Chemical Technology, 166 28, Prague, Czech RepublicV. RybkaInstitute of Chemical Technology, 166 28, Prague, Czech RepublicH. RysselFraunhofer Institut fuer Integrierte Schaltungen, 91058, Erlangen, GermanyAndreas KlugeFraunhofer Institut fuer Integrierte Schaltungen, 91058, Erlangen, Germany
2001en

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Polyimide (Upilex), polyethyleneterephtalate, polystyrene and polyethylene were irradiated with 20—200 KeV C+, N+, F+, Ar+ and Xe+ ions to the fluences up to 1017 cm−2 and the depth profiles of hydrogen and oxygen atoms in the polymer surface layer were determined using standard Rutherford Back-Scattering (RBS) and Elastic Recoil Detection (ERD) techniques. The H and O depth profiles are structureless with no local extremes and with the concentration monotonically increasing from the sample surface to the bulk value typical for pristine polymer. The H and O contents in the irradiated surface layer remain unchanged up to a critical fluence, which is a decreasing function of the energy density deposited by an ion. Then they decline rather rapidly and converge to 50—70% of their original values of unirradiated polymer. The decline rate is roughly the same for all ion/polymer combinations regardless of the ion mass and energy.

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