Maqola

Magnetron sputtering of a vanadium-diboride target in Ar+N2 gaseous mixtures

А. І. БажинDonetsk National University, Donetsk, UkraineAlexander GoncharovDonbass State Machinery Academy, Kramatorsk, Donetsk reg. 84313, UkraineV. V. PetukhovDonbass State Machinery Academy, Kramatorsk, Donetsk reg. 84313, UkraineT.D. RadjabovUzbek Academy of Science, UsbekistanВ. А. СтупакDonetsk National University, Donetsk, UkraineV. A. KonovalovDonbass State Machinery Academy, Kramatorsk, Donetsk reg. 84313, Ukraine

Vacuumjournal2006en

Ochiq kirish: yoʻq

ABI

Annotatsiya

Annotatsiya mavjud emas.

Mavzular

Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research Boron and Carbon Nanomaterials Research

Identifikatorlar

DOI: 10.1016/j.vacuum.2005.12.003

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