FSI Analysis of Microcantilevers Vibrating in Fluid Environment

Cantilever vibration in fluid environment is probably one of the most common Fluid Structure Interaction (FSI) problems in the field of Micro/Nano Electro Mechanical Systems (MEMS/NEMS). Usually the effect of fluid on cantilever oscillation is characterized in terms of mode resonance frequencies and quality factors (Qs), being those two physical quantities what is actually measured in the dynamic operation. In this work a new approach to the above FSI problem is proposed: modes Q factors and resonance frequencies in a viscous fluid environment are calculated through an eigenfrequency analysis thus avoiding time domain simulation as in all the previous works about a computational approach to the current problem. Besides a considerable reduction of the computational time, because of the frequency domain approach, our model demonstrates very high accuracy with respect both to analytical and experimental results.

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