Nonequilibrium structures and decay processes of clusters sputtered by ion bombardment
С. Е. МаксимовInstitute of Ion-Plasma and Laser Technologies, Uzbek Academy of Sciences, Tashkent, UzbekistanН. Х. ДжемилевInstitute of Ion-Plasma and Laser Technologies, Uzbek Academy of Sciences, Tashkent, UzbekistanБ. Л. ОксенгендлерInstitute of Ion-Plasma and Laser Technologies, Uzbek Academy of Sciences, Tashkent, UzbekistanI.A. WojciechowskiInstitute of Ion-Plasma and Laser Technologies, Uzbek Academy of Sciences, Tashkent, Uzbekistan
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A phenomenon of fragmentation of clusters sputtered by ion bombardment and containing both stable and metastable states is considered. The suggested kinetic model is based on the competition of three processes: detachment of atoms from metastable and stable states and drift-diffusion transfer from the former to the latter. Major regimes of fragmentation are identified and conclusion is made on the effect of the time of the diffusion transfer on the preexponential factor and fragmentation kinetics equation.
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