Composition, morphology, and electronic structure of the nanophases created on the SiO2 Surface by Ar+ ion bombardment
M. B. YusupjanovaTashkent State Technical University, ul. Universitetskaya 2, Tashkent, 100095, UzbekistanД. А. ТашмухамедоваTashkent State Technical University, ul. Universitetskaya 2, Tashkent, 100095, UzbekistanБ. Е. УмирзаковTashkent State Technical University, ul. Universitetskaya 2, Tashkent, 100095, Uzbekistan
Ochiq kirish: yoʻq
ABI
Annotatsiya
The influence of Ar+ bombardment on the composition and the structure of the SiO2/Si surface is studied. A thin Si film is found to form on the SiO2 surface subjected to high-dose ion bombardment.
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