Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5–6 MeV Energy Range
I. BányászHUN-REN Wigner Research Centre for Physics , P.O. Box 49 , ,I. RajtaInstitute for Nuclear Research , , P.O. Box 51 , ,Vladimír HavránekNuclear Physics Institute AV CR , ,María Cinta PujolUniversitat Rovira i Virgili , , Campus Sescelades , ,Gábor BazsóHUN-REN Wigner Research Centre for Physics , P.O. Box 49 , ,György KármánHUN-REN Wigner Research Centre for Physics , P.O. Box 49 , ,Gyula NagyInstitute for Nuclear Research , , P.O. Box 51 , ,
2024en
ABI
Annotatsiya
A method for the fabrication of high diffraction efficiency optical transmission gratings with quasi-sinusoidal profile in glasses by microbeams of medium-mass ions of 5-6 MeV energy was devised and demonstrated. Gratings with a 30 μm grating constant have been manufactured and characterized by interference microscopy and microprofilometry. The obtained surface profiles of the gratings were found to be quasi-sinusoidal with up to 265 nm amplitude. Measured highest first-order diffraction efficiencies were around 26% in both Pyrex and IOG glasses. Such gratings could serve as coupling elements in integrated optics and photonic integrated circuits.
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