Piezoelectric Response of Doped Mealn (Me = Sc, Zn, Ti, Zr, Y, Ta, Cr, Nb, Cu) Films Deposited by Rf Magnetron Sputtering
Vasiliy PelenovichWuhan UniversityXiaomei ZengWuhan UniversityRakhimbergan RakhimovAcademy of Sciences of UzbekistanSh. U. YuldashevA.D. PogrebnjakSumy State UniversityBing YangWuhan UniversitySheng LiuWuhan University
Ochiq kirishYashil
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