The effect of metal doping on the piezoelectric response of AlN film ultrasonic transducers
Xiaomei ZengHubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072 Wuhan, ChinaHeng JiangHubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072 Wuhan, ChinaRakhimbergan RakhimovTashkent International University of Education, 100207, Tashkent, UzbekistanShavkat YuldashevCenter of Nanotechnologies Development, National University of Uzbekistan, 100174 Tashkent, UzbekistanChangwei ZouSchool of Physics Science and Technology, Lingnan Normal University, 524048 Zhanjiang, ChinaJun ZhangSchool of Power and Mechanical Engineering, Wuhan University, 430072 Wuhan, ChinaOleksandr Dmytrovych PohrebniakFaculty of Material Science and Technology in Trnava, Institute Materials, Slovak University of Technology in Bratislava, 91724 Trnava, SlovakiaBing YangSchool of Power and Mechanical Engineering, Wuhan University, 430072 Wuhan, ChinaSheng LiuSchool of Integrated Circuits, Wuhan University, 430072 Wuhan, ChinaVasiliy PelenovichSchool of Integrated Circuits, Wuhan University, 430072 Wuhan, China
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