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Temperature-and atmosphere-dependent structural, morphological, and optical properties of ZrO2 thin films during thermal annealing

Gunel ImanovaAzerbaijan University of Architecture and ConstructionB.D. IgamovScientific and Technical Center with a Design Bureau and Pilot Production, Academy of Sciences of the Republic of UzbekistanJ.T. AbdurahimovKarshi State University 180119, Karshi, UzbekistanV.V. LobodaPeter the Great St. Petersburg Polytechnic University, Saint Petersburg, Russian FederationA.I. KamardinScientific and Technical Center with a Design Bureau and Pilot Production, Academy of Sciences of the Republic of UzbekistanD.A. NormurodovKarshi State University 180119, Karshi, UzbekistanHokman MahmudovMinistry of Science and Education Republic of AzerbaijanEsmira MansurovaMinistry of Science and Education Republic of AzerbaijanI.R. BekpulatovKarshi State University 180119, Karshi, Uzbekistan
2026en

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