The effect of neutron irradiation on the properties of SiC and SiC(N) layer prepared by plasma enhanced chemical vapor deposition
J. HuranInstitute of Electrical Engineering of the Slovak Academy of SciencesA. ValovičInstitute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 84104 Bratislava, SlovakiaP. BoháčekInstitute of Chemistry of the Slovak Academy of SciencesВ. Н. ШвецовJoint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Moscow Region, Russian FederationA.P. KobzevJoint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Moscow Region, Russian FederationS. B. BorzakovJoint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Moscow Region, Russian FederationAngela KleinováPolymer Institute, Slovak Academy of Sciences, Dúbravská cesta 9, 84541 Bratislava, SlovakiaM. SekáčováInstitute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 84104 Bratislava, SlovakiaJ. ArbetSlovak Academy of SciencesVlasta SasinkováInstitute of Chemistry, Slovak Academy of Sciences, Dúbravská cesta 9, 84538 Bratislava, Slovakia
2012en
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