Modification of Al/Si interface and Schottky barrier height with chemical treatment
Zs. J. HorváthHungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, MFA, P.O. Box 49, H-1525 Budapest, HungaryM. ÁdámInstitute for Technical Physics and Materials ScienceI.A. SzabóHungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, MFA, P.O. Box 49, H-1525 Budapest, HungaryMiklós SerényiHungarian Academy of SciencesVo Van TuyenHungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, MFA, P.O. Box 49, H-1525 Budapest, Hungary
2002en
ABI
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