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Dynamic-sasamal: simulation software for high-dose ion implantation

Y. MiyagawaNational Institute of Advanced Industrial Science and Technology, Shimo-Shidami, Moriyama-ku, Nagoya, JapanH. NakadateFlyura DjurabekovaApplied Physics Institute, National University of Uzbekistan, Tashkent, UzbekistanS. MiyagawaNational Institute of Advanced Industrial Science and Technology, Shimo-Shidami, Moriyama-ku, Nagoya, Japan

Surface and Coatings Technologyjournal2002en

ABI

Annotatsiya

Annotatsiya mavjud emas.

Mavzular

Ion-surface interactions and analysis Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research

Identifikatorlar

DOI: 10.1016/s0257-8972(02)00225-6

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