The ion dechanneling mechanism at grazing scattering on the surface atomic steps
A.A. DzhurakhalovB.S. KalandarovUrgench State University, Urgench, UzbekistanUchkun KutlievUrgench State University, Urgench, UzbekistanF. F. Umarov
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)conference2003en
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The dechanneling of ions from the monoatomic steps on the GaP[100] surface as well as the trajectories of these particles have been carefully studied. The energy and angular distributions of the dechanneling ions have been calculated. It was shown that the dechanneling ions form the characteristic peaks in the angular and energy distributions of scattered ions.
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