Synthesizing diamondlike films by PCVD for antireflection coating of germanium

This paper presents a group of studies on the synthesis of diamondlike films of hydrogenated carbon by the decomposition of acetylene in an rf-discharge plasma (the PCVD method). The optical and strength-related properties of the films are investigated as a function of the synthesis regimes, and the deposition rates are determined. A number of tests of films on glass and germanium substrates have been carried out under extreme conditions in order to determine their stability against various kinds of external effects. It is established that, owing to their optical, strength-related, and chemical properties, the resulting carbon films can be used in IR engineering as multifunctional coatings of optical elements. The resulting film-deposition rates are evidence of high productivity of the PCVD method. © 2004 Optical Society of America

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