Investigation of Zn diffusion into InP which preliminary thermal treated in nitrogen atmosphere
M. AkhmedovaPhysical-Technical Institute of Academy of Sciences, UzbekistanА. В. СмирновPhysical-Technical Institute of Academy of Sciences, Uzbekistan
2005en
ABI
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Preliminary thermal treatment of InP in nitrogen atmosphere before Zn diffusion process creates thin protective layer on the surface of semiconductor, which prevent evaporation of P and by this it reduces degradation of surface layer.
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