Study of micro-structured master fabrication on Nickel alloy by DPSS laser ablationtechnique
Annotatsiya
A direct write laser ablation process to create a m icro-structure as master based on Ni alloy has been developed. The q-switched Nd:YVO 4 laser source has been applied on a Ni alloy polishe d surface to fabricate a well defined microstructure without litography-based technologies. The effects of different processing parameters such as laser fluence, q-switch working frequency and scan rate have been examined in high vacuum conditions (10 -7 Torr). Both morphological and structural surface modifications of Ni alloy have b een investigated by Field Effect Scanning Electron Microscopy, EDX and microprofilometer 2D. The fabrication of some masters for glass hot embossing in microfluidics application has been performed. This study aims the understanding of nanosecond pulse Nd:YVO 4 availability in Ni alloy material direct master im printing.