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Study of Ion Scattering Process by the Method of Binary Collision Approximation

Kutliev Uchkun OtoboevichNarimonov Nurbek Davronbekovich Student of Physics Department,Karimov Muxtor KarimberganovichDepartment of Physics, faculty of Physic and mathematics of Urgench State University, Urgench, UzbekistanNarimonov Nurbek Davronbekovich
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In this paper presents the computer simulation method based on binary collision approximation for a study of low energy (E 0 = 1-15 keV) ion collisions on the surface of a solid and of the accompanying effect like namely scattering. The peculiarities of the process of correlated small angle scattering of 1-5 keV Ne Ar ions by the Cu(100) single-crystal surfaces have been investigated by computer simulation. It has been shown that under these conditions the inelastic energy losses become predominant over the elastic ones.

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