Surface Morphology and Phase Composition of (Zn,Sn)Se Thin Films, Obtained by Chemical-Molecular Beam Deposition
T. M. RazykovPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, UzbekistanК. M. KuchkarovPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, UzbekistanМ. С. ТивановFaculty of Physics, Belarusian State University, 220030, Minsk, BelarusD. S. BaykoFaculty of Physics, Belarusian State University, 220030, Minsk, BelarusI.A. KaputskayaFaculty of Physics, Belarusian State University, 220030, Minsk, BelarusN. I. PoliakFaculty of Physics, Belarusian State University, 220030, Minsk, BelarusO.V. KorolikFaculty of Physics, Belarusian State University, 220030, Minsk, BelarusB. A. ErgashevPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, UzbekistanR. T. YuldoshovPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, UzbekistanР. ХуррамовPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, UzbekistanJ. BekmirzaevPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, UzbekistanA. OlimovPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, UzbekistanD. Z. IsakovPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, UzbekistanM. A. MakhmudovPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, UzbekistanM. PirimmatovPhysical–technical Institute SPA “Physics–Sun”, AS RUz, 100084, Tashkent, Uzbekistan
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(Zn,Sn)Se films of different chemical composition ratio Zn/Sn were obtained by chemical molecular beam deposition (CMBD) method on borasilicate glass with variation the ratio of the partial pressure of ZnSe and SnSe in vapour phase during growth. Chemical and phase composition, as well as surface morphology of samples were investigated. The samples were found to be a thin films with a thickness of 2–3 μm with and evenly distribution of chemical elements. Grain structure, phase composition and surface roughness parameters dependencies on the elemental composition are determined.
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