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Effects of N2 partial pressure on microstructure and mechanical properties of cathodic arc deposited TiBN/TiAlSiN nano-multilayered coatings

Zesong WangWuhan University Shenzhen Research Institute, 6 Yuexin 2nd Rd., Shenzhen 518057, PR ChinaHE Zhao-yangSchool of Physics Science and Technology, Lingnan Normal University, Zhanjiang 524048, PR ChinaFeifan ChenSchool of Physics Science and Technology, Lingnan Normal University, Zhanjiang 524048, PR ChinaCanxin TianSchool of Physics Science and Technology, Lingnan Normal University, Zhanjiang 524048, PR ChinaU. V. ValievTsinghua University Innovation Center in Zhuhai, 101 College Rd., Tangjiawan Town, Zhuhai 519600, PR ChinaChangwei ZouSchool of Physics Science and Technology, Lingnan Normal University, Zhanjiang 524048, PR ChinaDejun FuWuhan University Shenzhen Research Institute, 6 Yuexin 2nd Rd., Shenzhen 518057, PR China
Materials Today Communicationsjournal2022en
ABI

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Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites

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DOI
10.1016/j.mtcomm.2022.103436

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