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UV laser formation of complex topologies for sensitive elements of navigation sensors based on surface acoustic waves

Daniil SafronovSamarkand State University, Faculty of Physics, 140104, University blv. 15, Samarkand city, Samarkand region, UzbekistanAlexander KukaevSt.-Petersburg Electrotechnical University, Prof. Popova str., 5, lit. F, 197022 St.-Petersburg, RussiaG.M. ShubinSt.-Petersburg Electrotechnical University, Prof. Popova str., 5, lit. F, 197022 St.-Petersburg, RussiaAlina V. GorelayaSt.-Petersburg Electrotechnical University, Prof. Popova str., 5, lit. F, 197022 St.-Petersburg, RussiaVladimir Y. VenediktovSt.-Petersburg Electrotechnical University, Prof. Popova str., 5, lit. F, 197022 St.-Petersburg, Russia

Optics & Laser Technologyjournal2023en

ABI

Annotatsiya

Annotatsiya mavjud emas.

Mavzular

Acoustic Wave Resonator Technologies Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators

Identifikatorlar

DOI: 10.1016/j.optlastec.2023.110000

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