Quasi-molecules of Sulphur in Silicon
Annotatsiya
The paper is concerned with the study of behavior of impurity centers of sulfur in silicon as a function of vapor pressure (P<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf>) of sulfur during its diffusion doping. It was revealed that at low Ps, sulfur in silicon is in a state of individual substitution atoms. Following the vapor pressure (P<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf>) ≥0,5 •10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> Pa, the «quasi-molecules» consisting of two neighboring sulfur substitution centers - S<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>, start to assemble in the bulk of silicon, and at P<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> ≥1•10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> Pa, we are witnessing the occurrence of «quasi-molecules» that presumably consist of four sulfur substitution centers - S<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf>. The concentration of both atomic centers and S<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>-type «quasi-molecules» tends to rise steadily as Ps increases. At the same time, the concentration of S<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf>-type «quasi-molecules» first has risen (before the pressure has reached P<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf>=2•10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> Pa), and then fallen. It was revealed that in the presence of such S<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf>-type «quasi-molecules» the sensitivity characteristics of the sample to various external influences substantially increased.