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Ish: Influence of collision processes in the sheath on ion energy distribution functions in radio frequency discharges

1. Sarlavhasiz

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   ABIABI:AkademIndex/openalex/2026.other.757428

2. Sarlavhasiz

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   ABIABI:AkademIndex/openalex/2026.other.757429

3. Sarlavhasiz

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   ABIABI:AkademIndex/openalex/2026.other.757430