The effect of metal doping on the piezoelectric response of AlN film ultrasonic transducers
Xiaomei ZengHubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072 Wuhan, ChinaHeng JiangHubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072 Wuhan, ChinaRakhimbergan RakhimovInstitute of Chemistry and Physics of Polymers of the Academy of Sciences of the Republic of Uzbekistan, 100128 Tashkent, UzbekistanShavkat YuldashevCenter of Nanotechnologies Development, National University of Uzbekistan, 100174 Tashkent, UzbekistanChangwei ZouSchool of Physics Science and Technology, Lingnan Normal University, 524048 Zhanjiang, ChinaJun ZhangSchool of Power and Mechanical Engineering, Wuhan University, 430072 Wuhan, ChinaOleksandr Dmytrovych PohrebniakFaculty of Electronics and Information Technologies, Sumy State University, 116 Kharkivska St., 40007 Sumy, UkraineBing YangSchool of Power and Mechanical Engineering, Wuhan University, 430072 Wuhan, ChinaSheng LiuHubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072 Wuhan, ChinaVasiliy PelenovichHubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072 Wuhan, China
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