STUDY of the influence of temperature and gamma radiation on the crystal structure of a thin TiO2 coating obtained on A Si (111) surface
B.E. UmirzakovInstitute of Ion-Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Durmon Yuli 33, 100125, Tashkent, UzbekistanZ.A. IsaxanovInstitute of Ion-Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Durmon Yuli 33, 100125, Tashkent, UzbekistanI.R. BekpulatovKarshi State University180119, Karshi, UzbekistanI.O. KosimovInstitute of Ion-Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Durmon Yuli 33, 100125, Tashkent, UzbekistanM.M. MaxmudovInstitute of Ion-Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Durmon Yuli 33, 100125, Tashkent, UzbekistanGunel ImanovaAzerbaijan University of Architecture and Construction, AZ1073, Baku, Azerbaijan
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