Effect of nitrogen pressure, bias voltage and substrate temperature on the phase structure of Mo–N coatings produced by cathodic arc PVD
Kürşat KazmanlıMetallurgical and Materials Engineering Department, Istanbul Technical University, Ayazaga, 80626 Istanbul, TurkeyMustafa ÜrgenMetallurgical and Materials Engineering Department, Istanbul Technical University, Ayazaga, 80626 Istanbul, TurkeyAli Fuat CakirMetallurgical and Materials Engineering Department, Istanbul Technical University, Ayazaga, 80626 Istanbul, Turkey
2003en
ABI
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