Fundamental understanding and modeling of reactive sputtering processes
S. BergThe Angstrom Laboratory, Uppsala university, Box 534, 751 21 Uppsala, SwedenTomas NybergThe Angstrom Laboratory, Uppsala university, Box 534, 751 21 Uppsala, Sweden
2005en
ABI
Annotatsiya
Annotatsiya mavjud emas.
Identifikatorlar
Iqtiboslar va manbalar
2 ta iqtibos0 ta foydalanilgan manba