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Deposition and mechanical evaluation of superhard Ti–Al–Si–N nanocomposite films by a hybrid coating system

In-Wook ParkSchool of Materials Science and Engineering, Pusan National University, Busan 609-735, South KoreaSung Ryong ChoiSchool of Materials Science and Engineering, Pusan National University, Busan 609-735, South KoreaJu Hyung SuhDepartment of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South KoreaChan‐Gyung ParkDepartment of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South KoreaKwang Ho KimSchool of Materials Science and Engineering, Pusan National University, Busan 609-735, South Korea
2003en
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