Electron Paramagnetic Resonance of the Mn Cluster in Silicon

Abstract In high‐resistivity p‐type and n‐type silicon doped with manganese the Mn cluster is identified by EPR. The spectrum shows a characteristic hyperfine structure and an angular dependence of fine structure at 20 K. The analysis of the spectrum yield the assumption of the following cluster model: the cluster consists of four Mn 0 atoms on nearest interstitial sites; it has cubic/tetrahedral symmetry; spin multiplets with S = 0, 1, 2, 3, 4, 5, and 6 are produced by a dominant exchange coupling where the multiplet with S = 6 is the ground state observed by the EPR experiments. The photo‐EPR results suggest a donor level (Mn 4 ) 0/+ near midgap.

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