Spectral Ellipsometry Study of Silicon Surfaces Implanted with Oxygen and Helium Ions
В. В. БазаровKazan E. K. Zavoisky Physical-Technical Institute (KPhTI), Kazan Science Center, Russian Academy of Sciences, 107 Sibirskii Trakt, 420029, Kazan, RussiaВ. И. НуждинKazan E. K. Zavoisky Physical-Technical Institute (KPhTI), Kazan Science Center, Russian Academy of Sciences, 107 Sibirskii Trakt, 420029, Kazan, RussiaВ. Ф. ВалеевKazan E. K. Zavoisky Physical-Technical Institute (KPhTI), Kazan Science Center, Russian Academy of Sciences, 107 Sibirskii Trakt, 420029, Kazan, RussiaN. M. LyadovKazan E. K. Zavoisky Physical-Technical Institute (KPhTI), Kazan Science Center, Russian Academy of Sciences, 107 Sibirskii Trakt, 420029, Kazan, Russia
2019en
ABI
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