Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors
Qing WanInstitute of Physics, Chinese Academy of Sciences, Beijing, People’s Republic of ChinaQ. H. LiInstitute of Physics, Chinese Academy of Sciences, Beijing, People’s Republic of ChinaYujin ChenInstitute of Physics, Chinese Academy of Sciences, Beijing, People’s Republic of ChinaT. H. WangInstitute of Physics, Chinese Academy of Sciences, Beijing, People’s Republic of ChinaXiaobo HeState Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, People’s Republic of ChinaJ. P. LiState Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, People’s Republic of ChinaChuan LinShanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, People’s Republic of China
2004en
ABI
Annotatsiya
Based on the achievement of synthesis of ZnO nanowires in mass production, ZnO nanowires gas sensors were fabricated with microelectromechanical system technology and ethanol-sensing characteristics were investigated. The sensor exhibited high sensitivity and fast response to ethanol gas at a work temperature of 300 °C. Our results demonstrate the potential application of ZnO nanowires for fabricating highly sensitive gas sensors.
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