Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
E.J. ConnollyElectronic Instrumentation Laboratory, DIMES, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The NetherlandsG.M. O’HalloranElectronic Instrumentation Laboratory, DIMES, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The NetherlandsH.T.M. PhamElectronic Components, Technology and Materials Laboratory, DIMES, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The NetherlandsP.M. SarroElectronic Components, Technology and Materials Laboratory, DIMES, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The NetherlandsP.J. FrenchElectronic Instrumentation Laboratory, DIMES, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands
2002en
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