Deposited debris characteristics and its reduction of a laser-produced plasma extreme ultraviolet source using a colloidal tin dioxide jet target
Masanori KakuUniversity of Miyazaki 1 Department of Electrical and Electronic Engineering and Photon Science Center, , Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192, JapanSumihiro SuetakeUniversity of Miyazaki 1 Department of Electrical and Electronic Engineering and Photon Science Center, , Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192, JapanYusuke SenbaUniversity of Miyazaki 1 Department of Electrical and Electronic Engineering and Photon Science Center, , Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192, JapanShoichi KuboderaUniversity of Miyazaki 1 Department of Electrical and Electronic Engineering and Photon Science Center, , Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192, JapanMasahito KattoUniversity of Miyazaki 2 Cooperative Research Center, , Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192, JapanTakeshi HigashiguchiUtsunomiya University 3 Department of Energy and Environmental Science, , Yoto 7-1-2, Utsunomiya, Tochigi 321-8585, Japan
2008en
ABI
Annotatsiya
Debris characteristics and their reduction have been investigated for a laser-produced plasma extreme ultraviolet source by using a colloidal jet target containing tin dioxide nanoparticles. The amounts of deposited debris on a witness plate were determined by total laser energy irradiated onto a target. In situ low-temperature (100°C) heating of a plate was effective to reduce the amounts of deposited debris, since colloidal debris was easily vaporized by the heat.
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