Low energy ion scattering by atomic steps on the single crystal surface

The energy, angular distributions and trajectories of particles scattered on surfaces of Ni(100) and Cu(100), with both ideal and damaged, and semi-infinite and isolated atomic steps, have been calculated. It has been shown that from the correlation between the experimental and calculated energy distributions of the scattered particles, one may determine the spatial extension of the isolated atomic steps and the distance between them on the single crystal surface damaged by ion bombardment. The energy and angular distributions of ions dechanneled from semi-infinite steps on the GaP(100) surface have been presented. It has been shown that the dechanneling ions form the characteristic peaks in the angular and energy distributions of the scattered particles.

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