Comparison of Infrared and Activation Analysis Results in Determining the Oxygen and Carbon Content in Silicon

The oxygen and carbon content of several silicon single crystals have been measured using 3He activation techniques and are compared with values determined from infrared absorption measurements. The oxygen and carbon content of these crystals as determined from the activation analysis ranged from <0.05 to 28 ppm and <0.05 to 7 ppm, respectively. The infrared absorption measurements gave results that agreed with the activation analysis to within ∼40%.

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