Maqola

Lead zirconate titanate thick film with enhanced electrical properties for high frequency transducer applications

Benpeng ZhuNIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, Los Angeles, CA, USAD. W. WuNIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, Los Angeles, CA, USAQifa ZhouNIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, Los Angeles, CA, USAK. Kirk ShungNIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, Los Angeles, CA, USA

2008en

ABI

Annotatsiya

Piezoelectric Pb(Zr 0.52 Ti 0.48 )O 3 thick film with the thickness around 10 mum has been deposited on the (111) Pt/Ti/SiO 2 /Si substrate using a ceramic powder/sol-gel solution modified composite method. X-ray diffraction analysis and scanning electron microscope revealed that the film was in the well-crystallized perovskite phase and cracked free. At 1 KHz, The dielectric constant and the loss were 1925 and 0.015, respectively. The remnant polarization was 42.0 muC/cm 2 at room temperature. A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 50% at 156 MHz.

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Identifikatorlar

DOI: 10.1109/ultsym.2008.0018

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