Energy spectra of ions and the energy dependence of the degree of ionization of atoms emitted from metals in a nonlinear sputtering mode
S.F. BelykhMATI Russian State Technological University, ul. Orshanskaya 3, Moscow, 121552, RussiaА. Б. ТолстогузовCentre for Physics and Technological Research (CeFITec), Dept. de Fisica da Faculdade de Ciencias e Tecnologia, Universidade Nova de Lisboa, Campus de Caparica, 2829-516, Caparica, PortugalA. A. LozovanMATI Russian State Technological University, ul. Orshanskaya 3, Moscow, 121552, Russia
2015en
ABI
Annotatsiya
Analytical formulas have been obtained for the energy spectrum F +(E) of atomic ions and the energy dependence of the degree of ionization α+(E) of atoms sputtered from metals in the nonlinear collision cascade mode. The comparison of the dependences α+(E) for the linear and nonlinear sputtering modes indicates a significant difference between the mechanisms responsible for the formation of the charge composition of atomic ions.
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